Mems device with large out-of-plane actuation and low-resistance interconnect and methods of use
Holyoak, Michael Jarret
Kannell, George Kenneth
Beacken, Marc Jay
Bishop, David J.
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Citation (published version)Michael Holyoke, George Kannel, Marc Beacken, David Bishop, Jackson Chang, Matthias Imboden. "Mems device with large out-of-plane actuation and low-resistance interconnect and methods of use." United States Patent Publication. Pub. No.: US 2017/0141755A1
The present application is directed to a MEMS device. The MEMS device includes a substrate having a first end and a second end extending along a longitudinal axis, the Substrate including an electrostatic actuator. The device also includes a movable plate having a first end and a second end. The device also includes a thermal actuator having a first end coupled to the first end of the substrate and a second end coupled to the first end of the plate. The actuator moves the plate in relation to the substrate. Further, the device includes a power source electrically coupled to the thermal actuator and the Substrate. The application is also directed to a method for operating a MEMS device.
Source: United States Patent and Trademark Office, www.uspto.gov”
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