Method for forming a sloped surface having a predetermined slope
MetadataShow full item record
Citation (published version)Greg Blonder. "Method for forming a sloped surface having a predetermined slope." Patent EP-0499944-B1.
This invention relates to photolithography and, in particular, to a method for forming on a workpiece in a single photolithographic operation, one or more sloped surfaces having respective predetermined slopes. The invention can be used to form rings, plateaus, tubs and valleys.