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dc.contributor.authorBlonder, Gregen_US
dc.date.accessioned2019-07-09T20:02:07Z
dc.date.available2019-07-09T20:02:07Z
dc.date.issued1997-04-23
dc.date.submitted1992-02-11
dc.identifierhttps://patents.google.com/patent/EP0499944B1/en
dc.identifier.citationGreg Blonder. "Method for forming a sloped surface having a predetermined slope." Patent EP-0499944-B1.
dc.identifier.govdocEP-0499944-B1
dc.identifier.urihttps://hdl.handle.net/2144/36328
dc.description.abstractThis invention relates to photolithography and, in particular, to a method for forming on a workpiece in a single photolithographic operation, one or more sloped surfaces having respective predetermined slopes. The invention can be used to form rings, plateaus, tubs and valleys.en_US
dc.titleMethod for forming a sloped surface having a predetermined slopeen_US
dc.typePatenten_US
dc.description.versionPublished versionen_US
pubs.elements-sourcemanual-entryen_US
pubs.notesEmbargo: Not knownen_US
pubs.organisational-groupBoston Universityen_US
pubs.organisational-groupBoston University, College of Engineeringen_US
pubs.organisational-groupBoston University, College of Engineering, Department of Mechanical Engineeringen_US
dc.identifier.mycv423803


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