Fine line scribing of conductive material
Fulton, Theodore A
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Citation (published version)Greg Blonder, Theodore A Fulton. "Fine line scribing of conductive material." U.S. Patent 5,149,404-A.
Fine lines (approximately 3 microns or less) are patternable on conductive materials by electromachining techniques. These micro-techniques differ from conventional electromachining in that the linewidth is primarily determined by the characteristics of the electric field rather than the electrode geometry.