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    Fine line scribing of conductive material

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    Date Issued
    1992-09-22
    Author(s)
    Blonder, Greg
    Fulton, Theodore A
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    Permanent Link
    https://hdl.handle.net/2144/36490
    Version
    Published version
    Citation (published version)
    Greg Blonder, Theodore A Fulton. "Fine line scribing of conductive material." U.S. Patent 5,149,404-A.
    Abstract
    Fine lines (approximately 3 microns or less) are patternable on conductive materials by electromachining techniques. These micro-techniques differ from conventional electromachining in that the linewidth is primarily determined by the characteristics of the electric field rather than the electrode geometry.
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    • ENG: Mechanical Engineering: Scholarly Papers [245]
    • BU Open Access Articles [3664]


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