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dc.contributor.authorAdato, Ronenen_US
dc.contributor.authorUyar, Aydanen_US
dc.contributor.authorZangeneh, Mahmouden_US
dc.contributor.authorZhou, Boyouen_US
dc.contributor.authorJoshi, Ajayen_US
dc.contributor.authorGoldberg, Bennetten_US
dc.contributor.authorUnlu, M. Selimen_US
dc.date.accessioned2020-04-13T15:44:39Z
dc.date.available2020-04-13T15:44:39Z
dc.date.issued2016
dc.identifier.citationRonen Adato, Aydan Uyar, Mahmoud Zangeneh, Boyou Zhou, Ajay Joshi, Bennett Goldberg, M. Selim Unlu. 2016. "Rapid mapping of digital integrated circuit logic gates via multi-spectral backside imaging." arXiv preprint arXiv:1605.09306,
dc.identifier.urihttps://hdl.handle.net/2144/40126
dc.description.abstractModern semiconductor integrated circuits are increasingly fabricated at untrusted third party foundries. There now exist myriad security threats of malicious tampering at the hardware level and hence a clear and pressing need for new tools that enable rapid, robust and low-cost validation of circuit layouts. Optical backside imaging offers an attractive platform, but its limited resolution and throughput cannot cope with the nanoscale sizes of modern circuitry and the need to image over a large area. We propose and demonstrate a multi-spectral imaging approach to overcome these obstacles by identifying key circuit elements on the basis of their spectral response. This obviates the need to directly image the nanoscale components that define them, thereby relaxing resolution and spatial sampling requirements by 1 and 2 - 4 orders of magnitude respectively. Our results directly address critical security needs in the integrated circuit supply chain and highlight the potential of spectroscopic techniques to address fundamental resolution obstacles caused by the need to image ever shrinking feature sizes in semiconductor integrated circuits.en_US
dc.language.isoen_US
dc.relation.ispartofarXiv preprint arXiv:1605.09306
dc.titleRapid mapping of digital integrated circuit logic gates via multi-spectral backside imagingen_US
dc.typeArticleen_US
dc.description.versionFirst author draften_US
pubs.elements-sourcemanual-entryen_US
pubs.notesdate-added: 2016-09-07 21:33:50 +0000 date-modified: 2016-09-07 21:33:50 +0000en_US
pubs.notesEmbargo: Not knownen_US
pubs.organisational-groupBoston Universityen_US
pubs.organisational-groupBoston University, College of Engineeringen_US
pubs.organisational-groupBoston University, College of Engineering, Department of Electrical & Computer Engineeringen_US
pubs.publication-statusPublisheden_US
dc.identifier.orcid0000-0002-8594-892X (Unlu, M Selim)
dc.identifier.mycv48105


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