Nanomechanical motion transducers for miniaturized mechanical systems
Files
Published version
Date
2017-04
Authors
Kouh, Taejoon
Hanay, M.
Ekinci, Kamil
Version
OA Version
Citation
Taejoon Kouh, M. Hanay, Kamil Ekinci. 2017. "Nanomechanical Motion Transducers for Miniaturized Mechanical Systems." Micromachines, v. 8, issue 4, pp. 108 - 108.
Abstract
Reliable operation of a miniaturized mechanical system requires that nanomechanical
motion be transduced into electrical signals (and vice versa) with high fidelity and in a robust
manner. Progress in transducer technologies is expected to impact numerous emerging and
future applications of micro- and, especially, nanoelectromechanical systems (MEMS and NEMS);
furthermore, high-precision measurements of nanomechanical motion are broadly used to study
fundamental phenomena in physics and biology. Therefore, development of nanomechanical motion
transducers with high sensitivity and bandwidth has been a central research thrust in the fields of
MEMS and NEMS. Here, we will review recent progress in this rapidly-advancing area.
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Attribution 4.0 International