Addressing neon gas field ion source instability through online beam current estimation

Files
Date
2022-08-01
Authors
Seidel, Sheila W.
Watkins, Luisa
Peng, Minxu
Agarwal, Akshay
Yu, Christopher
Goyal, Vivek K.
Version
Accepted manuscript
OA Version
Citation
S.W. Seidel, L. Watkins, M. Peng, A. Agarwal, C. Yu, V.K. Goyal. 2022. "Addressing Neon Gas Field Ion Source Instability Through Online Beam Current Estimation" Microscopy and Microanalysis, Volume 28, Issue S1, pp.36-39. https://doi.org/10.1017/s1431927622001064
Abstract
Description
License
© Microscopy Society of America 2022 This preprint version of the article is available under the CC BY-NC-ND license