Kouh, TaejoonHanay, M.Ekinci, Kamil2018-06-052018-06-052017-04Taejoon Kouh, M. Hanay, Kamil Ekinci. 2017. "Nanomechanical Motion Transducers for Miniaturized Mechanical Systems." Micromachines, v. 8, issue 4, pp. 108 - 108.2072-666Xhttps://hdl.handle.net/2144/29250Reliable operation of a miniaturized mechanical system requires that nanomechanical motion be transduced into electrical signals (and vice versa) with high fidelity and in a robust manner. Progress in transducer technologies is expected to impact numerous emerging and future applications of micro- and, especially, nanoelectromechanical systems (MEMS and NEMS); furthermore, high-precision measurements of nanomechanical motion are broadly used to study fundamental phenomena in physics and biology. Therefore, development of nanomechanical motion transducers with high sensitivity and bandwidth has been a central research thrust in the fields of MEMS and NEMS. Here, we will review recent progress in this rapidly-advancing area.p. 108-108Attribution 4.0 Internationalhttp://creativecommons.org/licenses/by/4.0/Microelectromechanical systems (MEMS)Nanoelectromechanical systems (NEMS)NanomechanicsTransducerActuatorSensorOptomechanicsElectromechanicsOscilatorResonatorArticle10.3390/mi8040108