Micromechanical microphone using sideband modulation of nonlinear resonators

Boales, JosephMateen, FarrukhMohanty, Pritiraj2018-04-052018-04-052017-08-28Joseph A Boales, Farrukh Mateen, Pritiraj Mohanty. 2017. "Micromechanical microphone using sideband modulation of nonlinear resonators." Appl. Phys. Lett. Volume 111, Issue 9, 093504 http://dx.doi.org/10.1063/1.18566900003-69511077-3118https://hdl.handle.net/2144/281924 pagesThis article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing.Science & technologyPhysical sciencesPhysics, appliedPhysicsNoisePressureEngineeringMicromechanical microphone using sideband modulation of nonlinear resonatorsArticle10.1063/1.4996993