Silicon waveguides and resonators with sub-0.1 dB/cm propagation loss and over 7 million Q in a foundry process

Onural, DenizGevorgyan, HaykZhang, BohanKhilo, AnatolPopović, Miloš A.2022-09-222022-09-222021D. Onural, H. Gevorgyan, B. Zhang, A. Khilo, M.A. Popović. 2021. "Silicon Waveguides and Resonators with Sub-0.1 dB/cm Propagation Loss and Over 7 Million Q in a Foundry Process." Frontiers in Optics + Laser Science 2021. Frontiers in Optics. 2021 - https://doi.org/10.1364/fio.2021.fth6b.4https://hdl.handle.net/2144/45165Propagation loss is characterized vs. waveguide width in a 220 nm silicon photonics foundry platform to form a compact model. Test paperclips and racetrack resonators with quality factors up to 7.6 million reveal losses as low as 0.064 dB/cm.en-US© 2021 The Author(s).Silicon waveguides and resonators with sub-0.1 dB/cm propagation loss and over 7 million Q in a foundry processConference materials10.1364/fio.2021.fth6b.4743235