Nanomechanical motion transducers for miniaturized mechanical systems
MetadataShow full item record
Citation (published version)Taejoon Kouh, M. Hanay, Kamil Ekinci. 2017. "Nanomechanical Motion Transducers for Miniaturized Mechanical Systems." Micromachines, v. 8, issue 4, pp. 108 - 108.
Reliable operation of a miniaturized mechanical system requires that nanomechanical motion be transduced into electrical signals (and vice versa) with high fidelity and in a robust manner. Progress in transducer technologies is expected to impact numerous emerging and future applications of micro- and, especially, nanoelectromechanical systems (MEMS and NEMS); furthermore, high-precision measurements of nanomechanical motion are broadly used to study fundamental phenomena in physics and biology. Therefore, development of nanomechanical motion transducers with high sensitivity and bandwidth has been a central research thrust in the fields of MEMS and NEMS. Here, we will review recent progress in this rapidly-advancing area.
RightsAttribution 4.0 International