Continuous-time modeling and analysis of particle beam metrology

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Date
2023
DOI
10.1109/jsait.2023.3283911
Authors
Agarwal, Akshay
Peng, Minxu
Goyal, Vivek K.
Version
Accepted manuscript
URI
https://hdl.handle.net/2144/48712
OA Version
Citation
A. Agarwal, M. Peng, V.K. Goyal. 2023. "Continuous-Time Modeling and Analysis of Particle Beam Metrology" IEEE Journal on Selected Areas in Information Theory, Volume 4, pp.61-74. https://doi.org/10.1109/jsait.2023.3283911
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