Online beam current estimation in particle beam microscopy through time-resolved measurement

Files
EIPBN2022 PDFA.pdf(490.95 KB)
Accepted version
Date
2022-05-31
DOI
10.48550/arXiv.2111.10611
Authors
Seidel, Sheila W.
Watkins, Luisa
Peng, Minxu
Agarwal, Akshay
Yu, Christopher C.
Goyal, Vivek
Version
Accepted manuscript
URI
https://hdl.handle.net/2144/45773
OA Version
Citation
S.W. Seidel, L. Watkins, M. Peng, A. Agarwal, C.C. Yu, V. Goyal. 2022. "Online Beam Current Estimation in Particle Beam Microscopy Through Time-Resolved Measurement" Proc. 65th Int. Conf. Electron, Ion, Photon Beam Technologies and Nanofabrication. https://arxiv.org/abs/2111.10611
Abstract
Description
License
Collections
BU Open Access Articles
ENG: Electrical and Computer Engineering: Scholarly Papers