Deep ultraviolet distributed Bragg reflectors based on graded composition AlGaN alloys
Date
2015-06-01
Authors
Brummer, Gordie
Nothern, Denis
Nikiforov, A. Yu
Moustakas, T.D.
Version
Published version
OA Version
Citation
G. Brummer, D. Nothern, A.Y. Nikiforov, T.D. Moustakas. 2015. "Deep ultraviolet distributed Bragg reflectors based on graded composition AlGaN alloys" Applied Physics Letters, Volume 106, Issue 22. https://doi.org/10.1063/1.4922215
Abstract
Distributed Bragg reflectors (DBRs) with peak reflectivity at approximately 280 nm, based on compositionally graded AlxGa1−xN alloys, were grown on 6H-SiC substrates by plasma-assisted molecular beam epitaxy. DBRs with square, sinusoidal, triangular, and sawtooth composition profiles were designed with the transfer matrix method. The crystal structure of these DBRs was studied with high-resolution x-ray diffraction of the (1¯015) reciprocal lattice point. The periodicity of the DBR profiles was confirmed with cross-sectional Z-contrast scanning transmission electron microscopy. The peak reflectance of these DBRs with 15.5 periods varies from 77% to 56% with corresponding full width at half maximum of 17–14 nm. Coupled mode analysis was used to explain the dependence of the reflectivity characteristics on the profile of the graded composition.
Description
License
Copyright 2015 AIP Publishing LLC.