Fine line scribing of conductive material
Files
Published version
Date
1992-09-22
DOI
Authors
Blonder, Greg
Fulton, Theodore A
Version
Published version
OA Version
Citation
Greg Blonder, Theodore A Fulton. "Fine line scribing of conductive material." U.S. Patent 5,149,404-A.
Abstract
Fine lines (approximately 3 microns or less) are patternable on conductive materials by electromachining techniques. These micro-techniques differ from conventional electromachining in that the linewidth is primarily determined by the characteristics of the electric field rather than the electrode geometry.