Optical waveguide structure including reflective asymmetric cavity
Files
Published version
Date
1993-01-26
DOI
Authors
Blonder, Greg
Cappuzzo, Mark
Clark, Harold R.
Scotti, Ronald
Wong, Yiu-Huen
Version
Published version
OA Version
Citation
Greg Blonder, Mark Cappuzzo, Harold Clark, Ronald Scotti, Yiu-Huen Wong. "Optical waveguide structure including reflective asymmetric cavity." U.S. Patent 5,182,787-A.
Abstract
A turning mirror in an optical waveguide structure is made by etching in the upper surface of the structure a cavity (18) that intercepts the path of light propagated by the waveguide (15, 16, 13). Preferably, the cavity is made to be asymmetric with the side (25) of the cavity remote from the waveguide sloping at typically a forty-five degree angle. The asymmetry can be introduced by using mask and etch techniques and treating the surface of the structure such that the etchant undercuts the mask on the side of the cavity remote from the waveguide to a greater extent than it undercuts the mask on the side of the cavity adjacent the waveguide.