Silicon waveguides and resonators with sub-0.1 dB/cm propagation loss and over 7 million Q in a foundry process
Files
Accepted manuscript
Date
2021
Authors
Onural, Deniz
Gevorgyan, Hayk
Zhang, Bohan
Khilo, Anatol
Popović, Miloš A.
Version
Accepted manuscript
OA Version
Citation
D. Onural, H. Gevorgyan, B. Zhang, A. Khilo, M.A. Popović. 2021. "Silicon Waveguides and Resonators with Sub-0.1 dB/cm Propagation Loss and Over 7 Million Q in a Foundry Process." Frontiers in Optics + Laser Science 2021. Frontiers in Optics. 2021 - https://doi.org/10.1364/fio.2021.fth6b.4
Abstract
Propagation loss is characterized vs. waveguide width in a 220 nm silicon photonics foundry platform to form a compact model. Test paperclips and racetrack resonators with quality factors up to 7.6 million reveal losses as low as 0.064 dB/cm.
Description
License
© 2021 The Author(s).