In-situ photonic circuit field characterization in electronics-photonics CMOS platform via backside flip-chip near-field scanning optical microscopy
Files
Accepted manuscript
Date
2022-05-15
DOI
Authors
Alqubaisi, Kenaish Al
Schiller, Mark
Zhang, Bohan
Onural, Deniz
Khilo, Anatol
Naughton, Michael J.
Popovic, Milos
Version
Accepted manuscript
OA Version
Citation
K. Alqubaisi, M. Schiller, B. Zhang, D. Onural, A. Khilo, M. Naughton, M. Popovic. 2022. "In-situ photonic circuit field characterization in electronics-photonics CMOS platform via backside flip-chip near-field scanning optical microscopy." OSA Technical Digest (Optical Society of America, 2022). CLEO. San Jose, CA, 2022-05-15 - 2022-05-20.
Abstract
We demonstrate device field characterization using NSOM collection and interaction measurement modes via the backside buried-oxide of large scale photonic circuits fabricated in monolithic electronics-photonics CMOS platforms (here a microdisk resonator) post-processed using flip-chip substrate-removal.
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License
© 2022 The Author(s).