Feedforward control algorithms for MEMS galvos and scanners

Files
Date
2021-08
DOI
10.1109/jmems.2021.3074301
Authors
Barrett, Lawrence K.
Imboden, Matthias
Javor, Joshua
Campbell, David K.
Bishop, David J.
Version
Published version
URI
https://hdl.handle.net/2144/45970
OA Version
Citation
L.K. Barrett, M. Imboden, J. Javor, D.K. Campbell, D.J. Bishop. 2021. "Feedforward Control Algorithms for MEMS Galvos and Scanners" IEEE Journal of Microelectromechanical Systems, Volume 30, Issue 4, pp.612-621. https://doi.org/10.1109/jmems.2021.3074301
Abstract
Description
License
This work is licensed under a Creative Commons Attribution 4.0 License
cb
Collections
BU Open Access Articles
ENG: Electrical and Computer Engineering: Scholarly Papers